SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//...
Available to Order
tech sheet
Details
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Operation
Normally Closed, Single Acting, Bellows Seal
Series
XL2
Actuator Working Temperature
5 to 60°C
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Actuation
Height mm
Length mm
Width mm
Seal Type
Feature
Operation
Application
Valve Material
Flange Specification
Angle
Ambient Temperature
Buy Price
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Available to Order
Normally Closed
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Available to Order
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48
77
121
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Available to Order
Normally Closed
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Available to Order
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Available to Order
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48
74
121
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Available to Order
Single acting
66
98
171
Bellows seal
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Normally Closed
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Available to Order
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Normally Closed Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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Bellows seal
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Normally Closed
High Vacuum
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Available to Order
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Available to Order
Normally Closed
48
74
121
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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High vacuum angle valve for semiconductor and vacuum applications
Aluminium
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–
Available to Order
Normally Closed
–
–
–
Bellows seal
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Available to Order
–
66
98
171
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–
–
–
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
High Vacuum Angle Valve
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–
–
Available to Order
Single acting
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Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
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KF NW
Angle Valve
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Available to Order
Single acting
38
60
108
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Bellows seal
Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
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Angle Valve
5 to 60°C
Available to Order