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M334-44977

SMC High Vacuum Angle Valve

Product Code: XLA-25-2

 

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Available to Order

tech sheet

Details

Seal Type
Bellows seal
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Height mm
48
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Length mm
74
Width mm
121
Series
XL2
Actuation
Normally Closed
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Valve Material
Aluminium

Specification

SMC High Vacuum Angle Valve, SMC