SMC High Vacuum Angle Valve
Product Code: XLA-25-2- Buy Price(exc VAT)
tech sheet
Details
Seal Type
Bellows seal
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Height mm
48
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Length mm
74
Width mm
121
Series
XL2
Actuation
Normally Closed
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Valve Material
Aluminium
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Length mm
Actuator Working Temperature
Operation
Height mm
Feature
Actuation
Width mm
Application
Flange Specification
Angle
Ambient Temperature
Buy Price
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
77
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48
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121
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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5 to 60°C
Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
74
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48
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121
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Available to Order
98
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Normally Closed
66
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
171
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Available to Order
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Normally Closed Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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Normally Closed
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High Vacuum
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Available to Order
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Available to Order
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Normally Closed
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High vacuum angle valve for semiconductor and vacuum applications
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–
Available to Order
98
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66
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171
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Normally Closed
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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High vacuum applications requiring minimal contamination and corrosion resistance
KF NW
Angle Valve
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Available to Order
60
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Normally Closed
38
Bellows seal
Single acting
108
High vacuum angle valve for semiconductor and vacuum applications
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Angle Valve
5 to 60°C
Available to Order