SMC High Vacuum Angle Valve
Product Code: XLA-16G-2- Buy Price(exc VAT)
tech sheet
Details
Seal Type
Bellows seal
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Actuation
Normally Closed
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Length mm
Width mm
Actuator Working Temperature
Operation
Feature
Actuation
Application
Valve Material
Flange Specification
Angle
Ambient Temperature
Buy Price
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
48
77
121
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Available to Order
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Normally Closed
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Available to Order
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Available to Order
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5 to 60°C
Normally Closed, Single Acting, Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
48
74
121
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Available to Order
66
98
171
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Normally Closed
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Single acting
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Available to Order
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Normally Closed Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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Normally Closed
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High Vacuum
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Available to Order
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Available to Order
48
74
121
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
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–
Available to Order
66
98
171
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
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High Vacuum Angle Valve
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Available to Order
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Normally Closed
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
High vacuum applications requiring minimal contamination and corrosion resistance
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KF NW
Angle Valve
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Available to Order
38
60
108
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Normally Closed
Bellows seal
Single acting
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
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Angle Valve
5 to 60°C
Available to Order