SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A...
Available to Order
tech sheet
Details
Seal Type
Bellows seal
Angle
Angle Valve
Manufacturer
SMC
Operation
Normally Closed
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Series
XL2
Actuation
Single acting
Body Material
Aluminium
Seal Material
FKM
Brand
SMC
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Flange Specification
KF NW
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Actuation
Height mm
Length mm
Width mm
Actuator Working Temperature
Application
Operation
Feature
Valve Material
Ambient Temperature
Buy Price
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Available to Order
Normally Closed
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Available to Order
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Available to Order
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48
77
121
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Available to Order
Normally Closed
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Available to Order
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Available to Order
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5 to 60°C
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
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Available to Order
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48
74
121
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Available to Order
Single acting
66
98
171
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Normally Closed
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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High Vacuum
Normally Closed
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Available to Order
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Available to Order
Normally Closed
48
74
121
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High vacuum angle valve for semiconductor and vacuum applications
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Aluminium
–
Available to Order
Normally Closed
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High vacuum angle valve for semiconductor and vacuum applications
–
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–
–
Available to Order
–
66
98
171
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–
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Available to Order
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Available to Order
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High Vacuum Angle Valve
Normally Closed Bellows Seal
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Available to Order
Single acting
38
60
108
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High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows seal
Aluminium
5 to 60°C
Available to Order