Details
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Manufacturer
SMC
Material
Gate O-ring FKM
Series
XGT
Actuation
Cassette Type Standard
Brand
SMC
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Valve Material
Model
Accessories
Offer Price
FKM (Gate O-ring Material)
XGT223-46236-1F
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
£14,900.69
Available to Order